The ADXRS612 is a complete angular rate sensor (gyroscope) that uses the Analog Devices, Inc. surface-micromachining process to make a functionally complete and low cost angular rate sensor integrated with all of the required electronics on one chip. The manufacturing technique for this device is the same high volume BIMOS process used for high reliability automotive airbag accelerometers.

The output signal, RATEOUT (1B, 2A), is a voltage propor-tional to angular rate about the axis normal to the top surface of the package. The output is ratiometric with respect to a provided reference supply. A single external resistor can be used to lower the scale factor. An external capacitor is used to set the bandwidth. Other external capacitors are required for operation.

A temperature output is provided for compensation techniques. Two digital self-test inputs electromechanically excite the sensor to test proper operation of both the sensor and the signal condi-tioning circuits. The ADXRS612 is available in a 7 mm × 7 mm × 3 mm BGA chip-scale package.