The ADXL50 is a complete acceleration measurement system on a single monolithic chip. It's based on a differential capacitive, surface-micromachined polysilicon accelerometer integrated with signal conditioning circuitry, including a TTL-compatible self-test feature. Read full article
Surface-machined Monolithic Accelerometer
ADXL50: the first commercially available surface-micromachined device. All signal-conditioning circuitry is on-chip
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