Learn about MEMS inertial sensor technology that detects and measures acceleration, tilt, shock, vibration, rotation, and multiple degrees-of-freedom (DoF). Determine the MEMS technology that will best support your motion sensing application. Download inertial sensor FAQs, white papers, and the latest technical article, Gyro Mechanical Performance: The Most Important Parameter, MS-2158. Read inertial sensor customer success stories. View solutions bulletins that highlight MEMS inertial sensor technologies.
Analog Devices offers discrete and integrated inertial sensor solutions -- iMEMS® accelerometers and gyroscopes, as well as highly integrated, fully calibrated and factory tested iSensor® intelligent sensors and inertial measurement units (IMUs).
What is Acceleration Sensing?
Acceleration sensing refers to the movement of an object from one point to another along a straight line or axis. It includes translational movement such as position and orientation. More...
What is Tilt Sensing?
Tilt sensing measures the inclination or angle of change with respect to gravity. More...
What is Rotation Sensing?
Rotation sensing measures the angular rate–how quickly an object turns. The rotation is typically measured in degrees per second of change and in reference to one of three axes: yaw, pitch, or roll. More...
What is Shock Sensing?
Shock sensing detects sudden impact at a predetermined level. More...
What is Vibration Sensing?
Vibration sensing detects acceleration and deceleration occurring in a periodic manner. More...
What is Multiple Degrees-of-Freedom Sensing?
Multiple DoF sensing relies on the combined input of multiple sensing types, such as acceleration and rotation, along multiple axis. More...
| Part# | # of Axes | Range | Sensitivity | -3dB Bandwidth | Sensitivity Accuracy (%) | Output Type | Noise Density (µg/rtHz) | Voltage Supply (V) | Supply Current | Automotive Qualified | Temp Range (°C) | Package | US Price 1000-4999 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| ADXL001 | 1 | +/- 70g | 16 mV/g (+/- 70g) | 22KHz | - | Analog | 4000 | 3.135 to 6 | 5mA | - | -40 to 125°C | 5mm x 5mm Ceramic LCC |
$ |
| ADXL103 | 1 | +/- 1.7g, +/- 18g, +/- 5g | 1000 mV/g | 2.5KHz | 4 | Analog | 110 | 3 to 6 | 700µA | Yes | -40 to 125°C | 5mm x 5mm x 2mm LCC |
$ |
| ADXL180 | 1 | 50 g to 500 g | 0.125 g/LSB (50 g), 1.25 g/LSB (500 g) | 800Hz | - | Digital | - | 5 to 14.5 | 7.7mA | - | -40 to 125°C | CP-16 | ** |
| ADXL193 | 1 | +/- 250g | 8 mV/g | 400Hz | 5 | Analog | 5000 | 4.75 to 5.25 | 1.5mA | Yes | -40 to 125°C | E-8 |
$ |
| ADXL203Reference Circuit Available | 2 | +/- 1.7g, +/- 18g, +/- 5g | 1000 mV/g | 2.5KHz | 4 | Analog | 110 | 3 to 6 | 700µA | - | -40 to 125°C | 5mm x 5mm x 2mm LCC |
$ |
| ADXL206 | 2 | +/- 5g | 312 mV/g | - | - | Analog | 110 | 4.75 to 5.25 | 700µA | - | -40 to 175°C | 8-Lead SBDIP |
$ |
| ADXL212 | 2 | +/- 2g | 12.5 %/g | 500Hz | 12.5 | Digital | - | 3 to 5.25 | 700µA | - | -40 to 85°C | 8-Lead LCC |
$ |
| ADXL213 | 2 | +/- 1.2g | 30 %/g | 2.5KHz | 10 | PWM | 160 | 3 to 6 | 700µA | - | -40 to 85°C | 5mm x 5mm x 2mm LCC |
$ |
| ADXL278 | 2 | +/- 70g | 27mV/g | 400Hz | 5 | Analog | 1800 | 4.75 to 5.25 | 2.2mA | Yes | -40 to 105- | 5mm x 5mm Ceramic LCC |
$ |
| ADXL312 | 3 | +/- 12 g | 345 LSB/g | 1.6KHz | - | Digital | 340 | 2.0 to 3.6 | 170µA | Yes | -40 to 105°C | 5mm x 5mm LFCSP |
$ |
| ADXL325 | 3 | +/- 5g | 174 mV/g | 1.6KHz | 10 | Analog | 250 | 1.8 to 3.6 | 350µA | - | -40 to 85°C | 4mm x 4mm LFCSP |
$ |
| ADXL326 | 3 | +/- 16g | 57 mV/g | 1.6KHz | 10 | Analog | 250 | 1.8 to 3.6 | 350µA | - | -40 to 85°C | 4mm x 4mm LFCSP |
$ |
| ADXL327 | 3 | +/- 2g | 420 mV/g | 1.6KHz | 10 | Analog | 250 | 1.8 to 3.6 | 350µA | - | -40 to 85°C | 4mm x 4mm LFCSP |
$ |
| ADXL335 | 3 | +/- 3g | 300 mV/g | 1.6KHz | 10 | Analog | 300 | 1.8 to 3.6 | 350µA | - | -40 to 85°C | 4mm x 4mm LFCSP |
$ |
| ADXL337 | 3 | +/- 3g | 300 mV/g | 1.6KHz | - | Analog | 175 | 1.8 to 3.6 | 300µA | - | -40 to 85°C | 3mm x 3mm LFCSP |
$ |
| ADXL343 | 3 | +/- 2/4/8/16g | 256 LSB/g | 320Hz | - | Digital | - | 2.0 to 3.6 | - | - | - | - |
$ |
| ADXL344 | 3 | +/- 2/4/8/16g | - | 3.2KHz | - | SPI | - | 1.7 to 2.75 | 140µA | - | - | - |
$ |
| ADXL345Reference Circuit Available | 3 | +/- 2/4/8/16g | up to 256 LSB/g | 1.6KHz | 10 | Digital | - | 2.0 to 3.6 | 145µA | - | -40 to 85°C | 3mm x 5mm x 1mm LGA |
$ |
| ADXL346 | 3 | +/- 2/4/8/16g | up to 256 LSB/g | 1.6KHz | 10 | Digital | - | 1.7 to 2.75 | 145µA | - | -40 to 85°C | 3mm x 3mm x 0.95 mm LGA |
$ |
| ADXL350 | 3 | +/- 2/4/8g | up to 256 LSB/g | 3.2KHz | - | SPI | - | 2.0 to 3.6 | 166µA | - | -40 to 85°C | - |
$ |
| ADXL362Reference Circuit Available | 3 | +/- 2/4/8g | 1 to 4 mg/LSB | 200Hz | - | Digital | 175 | 1.6 to 3.5 | 1.8µA | - | -40 to 85°C | - |
$ |
| ADXL377 | 3 | +/- 200g | 6.5 mV/g | 1.6KHz | - | Analog | 2400 | 3 to 3.6 | 300µA | - | -40 to 85°C | - |
$ |
| ADXL78 | 1 | +/- 70g | 27mV/g | 400Hz | 5 | Analog | 1800 | 4.75 to 5.25 | 1.3mA | Yes | -40 to 105- | 5mm x 5mm Ceramic LCC |
$ |
| Part# | Output Type | Sensing Axis | Range | -3dB Bandwidth | Voltage Supply (V) | Sensitivity | Sensitivity Accuracy (%) | Temp Sensor | Package |
|---|---|---|---|---|---|---|---|---|---|
| ADIS16003 | SPI | X, Y | +/- 1.7g | 2.25KHz | 3 to 5.25 | 1.22 mg/LSB | 7 | Yes | 7mm x 7mm LGA |
| ADIS16006 | SPI | X, Y | +/- 5g | 2.25KHz | 3 to 5.25 | 3.91 mg/LSB | 6 | Yes | 7mm x 7mm LGA |
| ADIS16201 | SPI | X, Y | +/- 1.7g | 2.25KHz | 3 to 3.6 | 0.10 °/LSB | 1 | Yes | 9 mm x 9mm LGA |
| ADIS16203 | SPI | Z | +/- 180° | 2.25KHz | 3 to 3.6 | 0.025 °/LSB | - | Yes | 9 mm x 9mm LGA |
| ADIS16204 | SPI | X, Y | +/- 70g X & +/- 37g Y | 40Hz | 3 to 3.6 | 17.13 mg/LSB | - | Yes | 9 mm x 9mm LGA |
| ADIS16209 | SPI | X, Y | +/- 90° or +/- 180° | 50Hz | 3 to 3.6 | 0.025 °/LSB | 0.4 | Yes | 9 mm x 9mm LGA |
| ADIS16210 | SPI | X, Y, Z | +/- 1.7g | 50Hz | 3.15 to 3.6 | - | 0.21 | Yes | - |
| ADIS16220 | SPI | X | +/- 70g | 1KHz | 3.15 to 3.6 | 19.073 mg/LSB | - | - | 9.2mm x 9.2mm LGA |
| ADIS16223 | SPI | X, Y or Z | +/- 70g | 14.25KHz | 3.15 to 3.6 | 4.768 mg/LSB | 5 | - | - |
| ADIS16227 | SPI | X, Y, Z | +/- 70g | 9KHz | - | - | 5 | - | - |
| ADIS16228 | SPI | X, Y, Z | - | 5KHz | 3.15 to 3.6 | - | 6 | Yes | - |
| ADIS16240 | SPI | X, Y, Z | +/- 18g | 1.6KHz | 2.4 to 3.6 | 51.4 mg/LSB | - | - | 12 mm x 12 mm BGA |
| Part# | Gyro Range | Bias Tempco °/sec/°C | In-Run Bias (°/hr) | ARW (°/sqrt hr) | Linear-g (°/sec/g) | Accelerometer Range | In-Run Bias (mg) | Max Pos Supply (V) | Package Size (mm) | US Price 1000-4999 |
|---|---|---|---|---|---|---|---|---|---|---|
| ADIS16300 | +/ - 300 °/s | 0.1 | 25 | 1.9 | 0.05 | +/-3 g | 0.054 | 5.25V | 23x31x6.3 |
$ |
| ADIS16305 | +/ - 300 °/s | 0.006 | 25 | 1.9 | 0.05 | +/-3 g | 0.037 | 5.25V | 23x31x6.3 |
$ |
| ADIS16334 | +/ - 300 °/s | 0.01 | 25 | - | 0.05 | +/-5 g | 0.1 | 5.25V | 24.1x32.7x10.6 |
$ |
| ADIS16360 | +/ - 300 °/s | 0.025 | 25 | 2 | 0.05 | +/-18 g | 0.2 | 5.25V | 23x23x23 |
$ |
| ADIS16362 | +/ - 300 °/s | 0.01 | 25 | 2 | 0.05 | +/-1.7 g | 0.041 | 5.25V | 23x23x23 |
$ |
| ADIS16364 | +/ - 300 °/s | 0.01 | 25 | 2 | 0.05 | +/-5 g | 0.1 | 5.25V | 23x23x23 |
$ |
| ADIS16365 | +/ - 300 °/s | 0.01 | 25 | 2 | 0.05 | +/-18 g | 0.2 | 5.25V | 23x23x23 |
$ |
| ADIS16367 | +/ - 300 °/s | 0.01 | 47 | 2 | 0.05 | +/-18 g | 0.2 | 5.25V | 23x23x23 |
$ |
| ADIS16375 | +/ - 300 °/s | 0.005 | 12 | 1 | 0.013 | +/-18 g | 0.1 | 3.6V | 47x44x14 |
$ |
| ADIS16385 | +/ - 300 °/s | 0.004 | 6 | 0.75 | 0.03 | +/-5 g | 0.05 | 5.15V | 44x35.6x38.9 |
$ |
| ADIS16400 | +/ - 300 °/s | 0.025 | 25 | 2 | 0.05 | +/-18 g | 0.2 | 5.25V | 23x23x23 |
$ |
| ADIS16405 | +/ - 300 °/s | 0.01 | 25 | 2 | 0.05 | +/-18 g | 0.2 | 5.25V | 23x23x23 |
$ |
| ADIS16407 | +/ - 300 °/s | 0.01 | 25 | 1.9 | 0.05 | +/-18 g | 0.2 | 5.25V | 23x23x23 |
$ |
| ADIS16445 | +/- 250 °/s | 40 | 12 | 0.56 | 0.015 | +/-5 g | 0.075 | 3.45V | 24.1x37.7x10.8 |
$ |
| ADIS16448 | +/- 1000 °/s | 0.005 | 14.5 | - | 0.015 | +/-18 g | 0.25 | 3.45V | 24.1x37.7x10.8 |
$ |
| ADIS16480 | +/- 450 °/s | 0.0025 | 6.25 | 0.3 | 0.009 | +/-18 g | 0.1 | 3.6V | 47x44x14 |
$ |
| ADIS16485 | +/- 450 °/s | 0.0025 | 6.25 | 0.3 | 0.009 | +/-5 g | 0.032 | 3.6V | 47x44x14 |
$ |
| ADIS16488 | +/- 450 °/s | 0.0025 | 6.25 | 0.3 | 0.009 | +/-18 g | 0.1 | 3.6V | 47x44x14 |
$ |
| Part# | Sensitivity | Temp Range (°C) | Noise Density (°/s/rtHz) | -3dB Bandwidth | Range | Output Type | Nonliniarity | Temp Sensor | Voltage Reference | Voltage Supply (V) | Supply Current | Package | US Price 1000-4999 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| ADXRS450Reference Circuit Available | 80 LSB/°/s | -40 to 105°C | 0.015 | 80Hz | +/-300 °/s | SPI | 0.04% of FS | Yes | No | 3 to 5.25 | 6mA | 14-LCC, 16-Lead SOIC |
$ |
| ADXRS453Reference Circuit Available | 80 LSB/°/s | -40 to 105°C | 0.015 | 775Hz | +/ - 300 °/s | SPI | 0.05% of FS rms | Yes | No | 3 to 5.25 | 6mA | 14-LCC, 16-Lead SOIC |
$ |
| ADXRS620 | 6 mv/°/s | -40 to 105°C | 0.05 | 2.5KHz | +/-300 °/s | Analog | 0.1% of FS | Yes | No | 4.75 to 5.25 | 3.5mA | 7 mm x 7mm x 3mm BGA |
$ |
| ADXRS622 | 7 mV/°/s | -40 to 105°C | 0.06 | 2.5KHz | +/- 250 °/s | Analog | 0.1% of FS | Yes | No | 4.75 to 5.25 | 3.5mA | 7 mm x 7mm x 3mm BGA |
$ |
| ADXRS623 | 12.5mV/°/s | -40 to 105°C | 0.04 | 3KHz | +/- 150 °/s | Analog | 0.1% of FS | Yes | No | 4.75 to 5.25 | 3.5mA | 7 mm x 7mm x 3mm BGA |
$ |
| ADXRS624 | 25 mV/°/s | -40 to 105°C | 0.04 | 1KHz | +/- 50 °/s | Analog | 0.1% of FS | Yes | No | 4.75 to 5.25 | 3.5mA | 7 mm x 7mm x 3mm BGA |
$ |
| ADXRS642 | 7 mV/°/s | -40 to 105°C | 0.02 | 2KHz | +/- 250 °/s | Analog | 0.1% of FS | Yes | No | 4.75 to 5.25 | 3.5mA | 7mm x 7mm x 3mm BGA |
$ |
| ADXRS646 | 9 mV/°/s | -40 to 125°C | 0.01 | 1Hz | +/- 250 °/s | Analog | 0.01% of FS | Yes | - | 5.75 to 6.25 | 4mA | 7 mm x 7mm x 3mm BGA |
$ |
| ADXRS649 | 0.1 mV/°/s | -40 to 105°C | 0.25 | 2KHz | +/- 20000 °/s | Analog | 0.1% of FS | Yes | No | 4.75 to 5.25 | 3.5mA | 7 mm x 7mm x 3mm BGA |
$ |
| ADXRS652 | 7 mV/°/s | -40 to 105°C | 0.06 | 2.5KHz | +/- 250 °/s | Analog | 0.1% of FS | Yes | No | 4.75 to 5.25 | 3.5mA | 7 mm x 7mm x 3mm BGA |
$ |
| ADXRS800 | - | -40 to 105°C | - | - | +/-300 °/s | SPI | - | Yes | - | 3 to 5 | - | 16-Lead SOIC | ** |
| Part# | Output Type | Range | -3dB Bandwidth | Sensitivity | Noise Density (°/s/rtHz) | Voltage Supply (V) | Supply Current | Package | US Price 1000-4999 |
|---|---|---|---|---|---|---|---|---|---|
| ADIS16060 | SPI | +/- 80 °/s | 1KHz | 0.0122 °/s/LSB | 0.04 | 4.75 to 5.25 | 6.5mA | 8mm x 8mm LGA |
$ |
| ADIS16080 | SPI | +/- 80 °/s | 40Hz | 0.098 °/s/LSB | 0.05 | 4.75 to 5.25 | 7mA | 8mm x 8mm LGA |
$ |
| ADIS16130 | SPI | +/- 250 °/s | 300Hz | 0.000042 °/s/LSB | 0.0125 | 4.75 to 5.25 | 73mA | 36 mm x 44 mm Mod |
$ |
| ADIS16133 | SPI | +/- 1400 | 335Hz | 0.05 °/s/LSB | 0.0122 | 4.85 to 5.15 | 88mA | 36 mm x 44 mm Mod |
$ |
| ADIS16135 | SPI | +/ - 300 °/s | - | 0.0122 °/s/LSB | 0.0122 | 4.75 to 5.25 | 88mA | 36 mm x 44 mm Mod |
$ |
| ADIS16136 | SPI | - | 380Hz | - | - | 4.75 to 5.25 | 120mA | - |
$ |
| ADIS16260 | SPI | +/- 80 to +/- 320 °/s | 335Hz | 0.0183 °/s/LSB | 0.044 | 4.75 to 5.25 | 41mA | 11.1 mm x 11.1mm LGA |
$ |
| ADIS16265 | SPI | +/- 80 to +/- 320 °/s | - | 0.0183 °/s/LSB | 0.044 | 4.75 to 5.25 | 41mA | 11.1 mm x 11.1mm LGA |
$ |
| ADIS16266 | SPI | - | 360Hz | 4.1 LSB/°/s | - | 4.75 to 5.25 | 41mA | - |
$ |
