MEMS Inertial Sensors

Learn about MEMS inertial sensor technology that detects and measures acceleration, tilt, shock, vibration, rotation, and multiple degrees-of-freedom (DoF). Determine the MEMS technology that will best support your motion sensing application. Download inertial sensor FAQs, white papers, and the latest technical article, Gyro Mechanical Performance: The Most Important Parameter, MS-2158. Read inertial sensor customer success stories. View solutions bulletins that highlight MEMS inertial sensor technologies.

Analog Devices offers discrete and integrated inertial sensor solutions -- iMEMS® accelerometers and gyroscopes, as well as highly integrated, fully calibrated and factory tested iSensor® intelligent sensors and inertial measurement units (IMUs).

PRODUCT SELECTION TABLES

Learn More About the Types of Inertial Sensing:

  • Sense Acceleration

  • What is Acceleration Sensing?

    Acceleration sensing refers to the movement of an object from one point to another along a straight line or axis. It includes translational movement such as position and orientation. More...

  • Sense Tilt

  • What is Tilt Sensing?

    Tilt sensing measures the inclination or angle of change with respect to gravity. More...

  • Sense Rotation

  • What is Rotation Sensing?

    Rotation sensing measures the angular rate–how quickly an object turns. The rotation is typically measured in degrees per second of change and in reference to one of three axes: yaw, pitch, or roll. More...

  • Sense Shock

  • What is Shock Sensing?

    Shock sensing detects sudden impact at a predetermined level. More...

  • Sense Vibration

  • What is Vibration Sensing?

    Vibration sensing detects acceleration and deceleration occurring in a periodic manner. More...

  • Sense Multiple Degrees-of-Freedom (DoF)

  • What is Multiple Degrees-of-Freedom Sensing?

    Multiple DoF sensing relies on the combined input of multiple sensing types, such as acceleration and rotation, along multiple axis. More...

MEMS Accelerometers

Part#Number of AxesAccelerometer Range in g +/- (max)-3dB Bandwidth (typ)Noise DensityOutput TypeSensitivity (typ)Sensitivity AccuracySupply CurrentVoltage SupplyAutomotive RecommendedUS Price 1000 to 4999Operating Temp Range
ADXL363 3 - - - Digital 1 to 4 mg/LSB - 1.95 µA - - $4.57 -40 to +85
ADXL375 3 +/- 200g 1.6 kHz 5000 Digital 20.5 LSBs/g - 145 µA - - $4.79 -40 to +85
ADXL313 3 +/- 0.5 g 1.6 kHz 150 Digital 1024 LSB/g 10 170 µA 2.0 to 3.6 Yes - -40 to +105
ADXL377 3 +/- 200g 1.6 kHz 2400 Analog 6.5 mV/g - 300 µA 3 to 3.6 - $4.79 -40 to +85
ADXL362Reference Circuit Available 3 +/- 2/4/8g 0.2 kHz 175 Digital 1 to 4 mg/LSB - 1.8 µA 1.6 to 3.5 - $3.97 -40 to +85
ADXL350 3 +/- 2/4/8g 1.6 kHz - SPI up to 256 LSB/g - 166 µA 2.0 to 3.6 - $4.57 -40 to +85
ADXL344 3 +/- 2/4/8/16g 1.6 kHz - SPI 256 LSB/g - 140 µA 1.7 to 2.75 - $1.15 -40 to +85
ADXL343 3 +/- 2/4/8/16g 0.32 kHz - Digital 256 LSB/g - - 2.0 to 3.6 - $1.15 -
ADXL212 2 +/- 2g 0.5 kHz - Digital 12.5 %/g 12.5 0.7 mA 3 to 5.25 - $12.23 -40 to +85
ADXL206 2 +/- 5g - 110 Analog 312 mV/g - 0.7 mA 4.75 to 5.25 - $569.00 -40 to 175°C
ADXL312 3 +/- 12 g 1.6 kHz 340 Digital 345 LSB/g - 170 µA 2.0 to 3.6 Yes $3.33 -40 to +105
ADXL337 3 +/- 3g 1.6 kHz 175 Analog 300 mV/g - 300 µA 1.8 to 3.6 - $1.57 -40 to +85
ADXL346 3 +/- 2/4/8/16g 1.6 kHz - Digital up to 256 LSB/g 10 145 µA 1.7 to 2.75 - $3.04 -40 to +85
ADXL327 3 +/- 2g 1.6 kHz 250 Analog 420 mV/g 10 350 µA 1.8 to 3.6 - $2.38 -40 to +85
ADXL326 3 +/- 16g 1.6 kHz 250 Analog 57 mV/g 10 350 µA 1.8 to 3.6 - $2.38 -40 to +85
ADXL325 3 +/- 5g 1.6 kHz 250 Analog 174 mV/g 10 350 µA 1.8 to 3.6 - $2.38 -40 to +85
ADXL345Reference Circuit Available 3 +/- 2/4/8/16g 1.6 kHz - Digital up to 256 LSB/g 10 145 µA 2.0 to 3.6 - $3.04 -40 to +85
ADXL001Reference Circuit Available 1 +/- 70g 22 kHz 4000 Analog 16 mV/g (+/- 70g) - 5 mA 3.135 to 6 - $13.29 -40 to +125
ADXL335 3 +/- 3g 1.6 kHz 300 Analog 300 mV/g 10 350 µA 1.8 to 3.6 - $2.38 -40 to +85
ADXL180 1 50 g to 500 g 0.8 kHz - Digital 0.125 g/LSB (50 g) - 7.7 mA 5 to 14.5 - - -40 to +125
ADXL213 2 +/- 1.2g 2.5 kHz 160 PWM 30 %/g 10 0.7 mA 3 to 6 - $12.23 -40 to +85
ADXL203Reference Circuit Available 2 +/- 1.7g 2.5 kHz 110 Analog 1000 mV/g 4 0.7 mA 3 to 6 - $12.23 -40 to +125
ADXL103 1 +/- 1.7g 2.5 kHz 110 Analog 1000 mV/g 4 0.7 mA 3 to 6 Yes $10.17 -40 to +125
ADXL78 1 +/- 70g 0.4 kHz 1800 Analog 27mV/g 5 1.3 mA 4.75 to 5.25 Yes $5.58 -40 to +105
ADXL278 2 +/- 70g 0.4 kHz 1800 Analog 27mV/g 5 2.2 mA 4.75 to 5.25 Yes $7.84 -40 to +105
ADXL193 1 +/- 250g 0.4 kHz 5000 Analog 8 mV/g 5 1.5 mA 4.75 to 5.25 Yes $6.68 -40 to +125
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iSensor MEMS Accelerometer Subsytems

Part#Device Primary FunctionOutput TypeSensing AxisRange-3dB BandwidthVoltage Supply (V)SensitivitySensitivity Accuracy (%)Temp Sensor
ADIS16229 Accelerometer for ADIS160 - - - 840 Hz 3 to 3.6 - 0.3 -
ADIS16000 Wireless gateway for ADIS - - - - - - - -
ADIS16228 Accelerometer W/FFT proce SPI X, Y, Z - 5 kHz 3.15 to 3.6 - 6 Yes
ADIS16210 Inclinometer SPI X, Y, Z +/- 1.7g 0.05 kHz 3.15 to 3.6 - 0.21 Yes
ADIS16227 Accelerometer W/FFT proce SPI X, Y, Z +/- 70g 9 kHz - - 5 -
ADIS16223 Accelerometer SPI X, Y or Z +/- 70g 14.25 kHz 3.15 to 3.6 4.768 mg/LSB 5 -
ADIS16240 Impact/Recorder SPI X, Y, Z +/- 18g 1.6 kHz 2.4 to 3.6 51.4 mg/LSB - -
ADIS16209 Inclinometer SPI X, Y +/- 90° or +/- 180° 0.05 kHz 3 to 3.6 0.025 °/LSB 0.4 Yes
ADIS16203 Inclinometer SPI Z +/- 180° 2.25 kHz 3 to 3.6 0.025 °/LSB - Yes
ADIS16201 Inclinometer SPI X, Y +/- 1.7g 2.25 kHz 3 to 3.6 0.10 °/LSB 1 Yes
ADIS16006 Accelerometer SPI X, Y +/- 5g 2.25 kHz 3 to 5.25 3.91 mg/LSB 6 Yes
ADIS16003 Accelerometer SPI X, Y +/- 1.7g 2.25 kHz 3 to 5.25 1.22 mg/LSB 7 Yes
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iSensor MEMS Inertial Measurement Units

Part#Gyro RangeBias TempcoIn-Run BiasARW-3dB BandwidthNoise Density (°/s/rtHz)Linear-gAccelerometer RangeBias TempcoNoise Density (µg/rtHz)Calibration Range (min)Calibration Range (max)MEMS Sensor TypeVsupply Positive (min)Vsupply Positive (max)Isupply (max)Operating Temp RangeMEMS Sensitivity (typ)
ADIS16488A +/- 450 °/s 0.0025 5.1 0.3 5.5 kHz 0.0066 0.009 +/-18 g 16 67 70 -40 IMU 3 3.6 254 -40 to +85 0.0031°/s/LSB(+/-75°/s)
ADIS16445 +/- 250 °/s 40 12 0.56 - - 0.015 +/-5 g 0.005 - - - IMU 3.15 3.45 - - -
ADIS16448 +/- 1000 °/s 0.005 14.5 0.66 0.33 kHz - 0.015 +/-18 g 40 - - - IMU 3.15 3.45 76 mA -40 to +85 -
ADIS16485 +/- 450 °/s 0.0025 6.25 0.3 0.33 kHz - 0.009 +/-5 g 0.035 - -40 70 IMU - 3.6 197 mA -40 to +85 -
ADIS16480 +/- 450 °/s 0.0025 6.25 0.3 0.33 kHz - 0.009 +/-18 g 0.035 - -40 85 IMU 3 3.6 254 mA - -
ADIS16407 +/ - 300 °/s 0.01 25 1.9 0.33 kHz - 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 70 mA -40 to +105 0.05 °/s/LSB (+/-300°/s)
ADIS16334 +/ - 300 °/s 0.01 25 - 0.33 kHz 0.044 0.05 +/-5 g 0.05 - -40 85 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16375 +/ - 300 °/s 0.005 12 1 0.33 kHz 0.02 0.013 +/-18 g 0.035 - -40 85 IMU 3 3.6 173 mA -40 to +85 0.01311 °/s/LSB
ADIS16305 +/ - 300 °/s 0.006 25 1.9 0.33 kHz 0.04 0.05 +/-3 g 0.3 - -40 85 IMU 4.75 5.25 42 mA -40 to +85 0.0125°/s/LSB (+/-75°/s)
ADIS16367 +/ - 300 °/s 0.01 47 2 0.33 kHz 0.044 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 49 mA -40 to +105 0.05 °/s/LSB (+/-300°/s)
ADIS16362 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.044 0.05 +/-1.7 g 0.05 - -20 70 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16405 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.05 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 45 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16365 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.05 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16364 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.05 0.05 +/-5 g 0.05 - -20 70 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16300 +/ - 300 °/s 0.1 25 1.9 0.33 kHz 0.038 0.05 +/-3 g 0.45 - - 25 IMU 4.75 5.25 42 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
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MEMS Gyroscopes

Part#Sensing AxisMeasurement RangeMEMS Sensitivity (typ)Noise Density (typ)-3dB Bandwidth (typ)Nonlinearity (typ)Temp SensorVoltage ReferenceVoltage SupplySupply Current (typ)US Price 1000 to 4999Operating Temp RangeAutomotive RecommendedMEMS Sensor Type
ADXRS290 X, Y +/- 100 °/s 200 LSB/°/s 0.004 480 Hz +/- 0.5% of FS Yes No 2.7 to 5 7.8 mA $3.55 -25 to +85 - Gyroscope
ADXRS645 - +/- 20000 °/s - 0.25 2000 Hz 0.1% of FS Yes No 4.75 to 5.25 - $975.00 -40 to 175°C - Gyroscope
ADXRS646 Z +/- 250 °/s 9 mV/°/s 0.01 1 0.01% of FS Yes - 5.75 to 6.25 4 mA $61.82 -40 to +125 - Gyroscope
ADXRS800 Z +/-300 °/s - - - - Yes - 3 to 5 - - -40 to +105 Yes Gyroscope
ADXRS642 Z +/- 250 °/s 7 mV/°/s 0.02 2 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $41.85 -40 to +105 - Gyroscope
ADXRS649 - +/- 20000 °/s 0.1 mV/°/s 0.25 2 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $58.59 -40 to +105 - Gyroscope
ADXRS453Reference Circuit Available - +/ - 300 °/s 80 LSB/°/s 0.015 0.775 kHz 0.05% of FS rms Yes No 3 to 5.25 6 mA $48.24 -40 to +105 - Gyroscope
ADXRS450Reference Circuit Available - +/-300 °/s 80 LSB/°/s 0.015 0.08 kHz 0.04% of FS Yes No 3 to 5.25 6 mA $33.40 -40 to +105 - Gyroscope
ADXRS652 - +/- 250 °/s 7 mV/°/s 0.06 2.5 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $21.69 -40 to +105 - Gyroscope
ADXRS624 - +/- 50 °/s 25 mV/°/s 0.04 1 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24 -40 to +105 - Gyroscope
ADXRS623 - +/- 150 °/s 12.5mV/°/s 0.04 3 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24 -40 to +105 - Gyroscope
ADXRS622 Z +/- 250 °/s 7 mV/°/s 0.06 2.5 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24 -40 to +105 - Gyroscope
ADXRS620 - +/-300 °/s 6 mv/°/s 0.05 2.5 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24 -40 to +105 - Gyroscope
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iSensor MEMS Gyroscope Subsystems

Part#Output TypeRange-3dB BandwidthSensitivityNoise Density (°/s/rtHz)Voltage Supply (V)Supply CurrentUS Price 1000 to 4999
ADIS16137 Digital +/- 1000 °/s 400 Hz - 0.00357 4.75 to 5.25 120 mA $689.00
ADIS16266 SPI - 0.36 kHz 4.1 LSB/°/s - 4.75 to 5.25 41 mA $84.00
ADIS16136 SPI - 0.38 kHz - - 4.75 to 5.25 120 mA $649.00
ADIS16133 SPI +/- 1400 0.335 kHz 0.05 °/s/LSB 0.0122 4.85 to 5.15 88 mA $548.00
ADIS16135 SPI +/ - 300 °/s - 0.0122 °/s/LSB 0.0122 4.75 to 5.25 88 mA $499.00
ADIS16265 SPI +/- 80 to +/- 320 °/s - 0.0183 °/s/LSB 0.044 4.75 to 5.25 41 mA $56.57
ADIS16260 SPI +/- 80 to +/- 320 °/s 0.335 kHz 0.0183 °/s/LSB 0.044 4.75 to 5.25 41 mA $42.48
ADIS16060 SPI +/- 80 °/s 1 kHz 0.0122 °/s/LSB 0.04 4.75 to 5.25 6.5 mA $35.37
ADIS16080 SPI +/- 80 °/s 0.04 kHz 0.098 °/s/LSB 0.05 4.75 to 5.25 7 mA $35.37
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