MEMS Inertial Sensors

Learn about MEMS inertial sensor technology that detects and measures acceleration, tilt, shock, vibration, rotation, and multiple degrees-of-freedom (DoF). Determine the MEMS technology that will best support your motion sensing application. Download inertial sensor FAQs, white papers, and the latest technical article, Gyro Mechanical Performance: The Most Important Parameter, MS-2158. Read inertial sensor customer success stories. View solutions bulletins that highlight MEMS inertial sensor technologies.

Analog Devices offers discrete and integrated inertial sensor solutions -- iMEMS® accelerometers and gyroscopes, as well as highly integrated, fully calibrated and factory tested iSensor® intelligent sensors and inertial measurement units (IMUs).

PRODUCT SELECTION TABLES

Learn More About the Types of Inertial Sensing:

  • Sense Acceleration

  • What is Acceleration Sensing?

    Acceleration sensing refers to the movement of an object from one point to another along a straight line or axis. It includes translational movement such as position and orientation. More...

  • Sense Tilt

  • What is Tilt Sensing?

    Tilt sensing measures the inclination or angle of change with respect to gravity. More...

  • Sense Rotation

  • What is Rotation Sensing?

    Rotation sensing measures the angular rate–how quickly an object turns. The rotation is typically measured in degrees per second of change and in reference to one of three axes: yaw, pitch, or roll. More...

  • Sense Shock

  • What is Shock Sensing?

    Shock sensing detects sudden impact at a predetermined level. More...

  • Sense Vibration

  • What is Vibration Sensing?

    Vibration sensing detects acceleration and deceleration occurring in a periodic manner. More...

  • Sense Multiple Degrees-of-Freedom (DoF)

  • What is Multiple Degrees-of-Freedom Sensing?

    Multiple DoF sensing relies on the combined input of multiple sensing types, such as acceleration and rotation, along multiple axis. More...

MEMS Accelerometers

Part## of AxesRange Sensitivity (typ)-3dB BandwidthSensitivity Accuracy (%)Output TypeNoise Density (µg/rtHz)Voltage Supply (V)Supply CurrentAutomotive RecommendedTemp Range (°C)US Price 1000 to 4999
ADXL363 3 - 1 to 4 mg/LSB - - Digital - - 1.95 µA - - $4.57
ADXL375 3 +/- 200g 20.5 LSBs/g 1.6 kHz - Digital 5000 - 145 µA - - $4.79
ADXL313 3 +/- 0.5 g 1024 LSB/g 1.6 kHz 10 Digital 150 2.0 to 3.6 170 µA Yes -40 to 105- -
ADXL377 3 +/- 200g 6.5 mV/g 1.6 kHz - Analog 2400 3 to 3.6 300 µA - -40 to 85°C $4.79
ADXL362Reference Circuit Available 3 +/- 2/4/8g 1 to 4 mg/LSB 0.2 kHz - Digital 175 1.6 to 3.5 1.8 µA - -40 to 85°C $3.97
ADXL350 3 +/- 2/4/8g up to 256 LSB/g 1.6 kHz - SPI - 2.0 to 3.6 166 µA - -40 to 85°C $4.57
ADXL344 3 +/- 2/4/8/16g 256 LSB/g 1.6 kHz - SPI - 1.7 to 2.75 140 µA - - $1.15
ADXL343 3 +/- 2/4/8/16g 256 LSB/g 0.32 kHz - Digital - 2.0 to 3.6 - - - $1.15
ADXL212 2 +/- 2g 12.5 %/g 0.5 kHz 12.5 Digital - 3 to 5.25 0.7 mA - -40 to 85°C $12.23
ADXL206 2 +/- 5g 312 mV/g - - Analog 110 4.75 to 5.25 0.7 mA - -40 to 175°C $569.00
ADXL312 3 +/- 12 g 345 LSB/g 1.6 kHz - Digital 340 2.0 to 3.6 170 µA Yes -40 to 105°C $3.33
ADXL337 3 +/- 3g 300 mV/g 1.6 kHz - Analog 175 1.8 to 3.6 300 µA - -40 to 85°C $1.57
ADXL346 3 +/- 2/4/8/16g up to 256 LSB/g 1.6 kHz 10 Digital - 1.7 to 2.75 145 µA - -40 to 85°C $3.04
ADXL327 3 +/- 2g 420 mV/g 1.6 kHz 10 Analog 250 1.8 to 3.6 350 µA - -40 to 85°C $2.38
ADXL326 3 +/- 16g 57 mV/g 1.6 kHz 10 Analog 250 1.8 to 3.6 350 µA - -40 to 85°C $2.38
ADXL325 3 +/- 5g 174 mV/g 1.6 kHz 10 Analog 250 1.8 to 3.6 350 µA - -40 to 85°C $2.38
ADXL345Reference Circuit Available 3 +/- 2/4/8/16g up to 256 LSB/g 1.6 kHz 10 Digital - 2.0 to 3.6 145 µA - -40 to 85°C $3.04
ADXL001Reference Circuit Available 1 +/- 70g 16 mV/g (+/- 70g) 22 kHz - Analog 4000 3.135 to 6 5 mA - -40 to 125°C $13.29
ADXL335 3 +/- 3g 300 mV/g 1.6 kHz 10 Analog 300 1.8 to 3.6 350 µA - -40 to 85°C $2.38
ADXL180 1 50 g to 500 g 0.125 g/LSB (50 g) 0.8 kHz - Digital - 5 to 14.5 7.7 mA - -40 to 125°C -
ADXL213 2 +/- 1.2g 30 %/g 2.5 kHz 10 PWM 160 3 to 6 0.7 mA - -40 to 85°C $12.23
ADXL203Reference Circuit Available 2 +/- 1.7g 1000 mV/g 2.5 kHz 4 Analog 110 3 to 6 0.7 mA - -40 to 125°C $12.23
ADXL103 1 +/- 1.7g 1000 mV/g 2.5 kHz 4 Analog 110 3 to 6 0.7 mA Yes -40 to 125°C $10.17
ADXL78 1 +/- 70g 27mV/g 0.4 kHz 5 Analog 1800 4.75 to 5.25 1.3 mA Yes -40 to 105- $5.58
ADXL278 2 +/- 70g 27mV/g 0.4 kHz 5 Analog 1800 4.75 to 5.25 2.2 mA Yes -40 to 105- $7.84
ADXL193 1 +/- 250g 8 mV/g 0.4 kHz 5 Analog 5000 4.75 to 5.25 1.5 mA Yes -40 to 125°C $6.68
back to top

iSensor MEMS Accelerometer Subsytems

Part#Device Primary FunctionOutput TypeSensing AxisRange-3dB BandwidthVoltage Supply (V)SensitivitySensitivity Accuracy (%)Temp Sensor
ADIS16229 Accelerometer for ADIS160 - - - 840 Hz 3 to 3.6 - 0.3 -
ADIS16000 Wireless gateway for ADIS - - - - - - - -
ADIS16228 Accelerometer W/FFT proce SPI X, Y, Z - 5 kHz 3.15 to 3.6 - 6 Yes
ADIS16210 Inclinometer SPI X, Y, Z +/- 1.7g 0.05 kHz 3.15 to 3.6 - 0.21 Yes
ADIS16227 Accelerometer W/FFT proce SPI X, Y, Z +/- 70g 9 kHz - - 5 -
ADIS16223 Accelerometer SPI X, Y or Z +/- 70g 14.25 kHz 3.15 to 3.6 4.768 mg/LSB 5 -
ADIS16240 Impact/Recorder SPI X, Y, Z +/- 18g 1.6 kHz 2.4 to 3.6 51.4 mg/LSB - -
ADIS16209 Inclinometer SPI X, Y +/- 90° or +/- 180° 0.05 kHz 3 to 3.6 0.025 °/LSB 0.4 Yes
ADIS16203 Inclinometer SPI Z +/- 180° 2.25 kHz 3 to 3.6 0.025 °/LSB - Yes
ADIS16201 Inclinometer SPI X, Y +/- 1.7g 2.25 kHz 3 to 3.6 0.10 °/LSB 1 Yes
ADIS16006 Accelerometer SPI X, Y +/- 5g 2.25 kHz 3 to 5.25 3.91 mg/LSB 6 Yes
ADIS16003 Accelerometer SPI X, Y +/- 1.7g 2.25 kHz 3 to 5.25 1.22 mg/LSB 7 Yes
back to top

iSensor MEMS Inertial Measurement Units

Part#Gyro RangeBias Tempco °/sec/°CIn-Run Bias (°/hr)ARW (°/sqrt hr)Linear-g (°/sec/g)Accelerometer Range In-Run Bias (mg)Vsupply Positive (max)US Price 1000 to 4999
ADIS16488A +/- 450 °/s 0.0025 5.1 0.3 0.009 +/-18 g 0.1 3.6 $1190.00
ADIS16445 +/- 250 °/s 40 12 0.56 0.015 +/-5 g 0.075 3.45 $395.00
ADIS16448 +/- 1000 °/s 0.005 14.5 0.66 0.015 +/-18 g 0.25 3.45 $459.00
ADIS16485 +/- 450 °/s 0.0025 6.25 0.3 0.009 +/-5 g 0.032 3.6 $1095.00
ADIS16480 +/- 450 °/s 0.0025 6.25 0.3 0.009 +/-18 g 0.1 3.6 $1545.00
ADIS16407 +/ - 300 °/s 0.01 25 1.9 0.05 +/-18 g 0.2 5.25 $444.00
ADIS16334 +/ - 300 °/s 0.01 25 - 0.05 +/-5 g 0.1 5.25 $336.00
ADIS16375 +/ - 300 °/s 0.005 12 1 0.013 +/-18 g 0.1 3.6 $649.00
ADIS16305 +/ - 300 °/s 0.006 25 1.9 0.05 +/-3 g 0.037 5.25 $96.00
ADIS16367 +/ - 300 °/s 0.01 47 2 0.05 +/-18 g 0.2 5.25 $403.00
ADIS16362 +/ - 300 °/s 0.01 25 2 0.05 +/-1.7 g 0.041 5.25 $336.00
ADIS16405 +/ - 300 °/s 0.01 25 2 0.05 +/-18 g 0.2 5.25 $412.00
ADIS16365 +/ - 300 °/s 0.01 25 2 0.05 +/-18 g 0.2 5.25 $375.00
ADIS16364 +/ - 300 °/s 0.01 25 2 0.05 +/-5 g 0.1 5.25 $336.00
ADIS16300 +/ - 300 °/s 0.1 25 1.9 0.05 +/-3 g 0.054 5.25 $74.00
back to top

MEMS Gyroscopes

Part#SensitivityTemp Range (°C)Noise Density (°/s/rtHz)-3dB BandwidthRangeOutput TypeNonliniarityTemp SensorVoltage ReferenceVoltage Supply (V)Supply CurrentUS Price 1000 to 4999
ADXRS646 9 mV/°/s -40 to 125°C 0.01 1 +/- 250 °/s Analog 0.01% of FS Yes - 5.75 to 6.25 4 mA $61.82
ADXRS800 - -40 to 105°C - - +/-300 °/s SPI - Yes - 3 to 5 - -
ADXRS642 7 mV/°/s -40 to 105°C 0.02 2 kHz +/- 250 °/s Analog 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $41.85
ADXRS649 0.1 mV/°/s -40 to 105°C 0.25 2 kHz +/- 20000 °/s Analog 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $58.59
ADXRS453Reference Circuit Available 80 LSB/°/s -40 to 105°C 0.015 0.775 kHz +/ - 300 °/s SPI 0.05% of FS rms Yes No 3 to 5.25 6 mA $48.24
ADXRS450Reference Circuit Available 80 LSB/°/s -40 to 105°C 0.015 0.08 kHz +/-300 °/s SPI 0.04% of FS Yes No 3 to 5.25 6 mA $33.40
ADXRS652 7 mV/°/s -40 to 105°C 0.06 2.5 kHz +/- 250 °/s Analog 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $21.69
ADXRS624 25 mV/°/s -40 to 105°C 0.04 1 kHz +/- 50 °/s Analog 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24
ADXRS623 12.5mV/°/s -40 to 105°C 0.04 3 kHz +/- 150 °/s Analog 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24
ADXRS622 7 mV/°/s -40 to 105°C 0.06 2.5 kHz +/- 250 °/s Analog 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24
ADXRS620 6 mv/°/s -40 to 105°C 0.05 2.5 kHz +/-300 °/s Analog 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24
back to top

iSensor MEMS Gyroscope Subsystems

Part#Output TypeRange-3dB BandwidthSensitivityNoise Density (°/s/rtHz)Voltage Supply (V)Supply CurrentUS Price 1000 to 4999
ADIS16137 Digital +/- 1000 °/s 400 Hz - 0.00357 4.75 to 5.25 120 mA $689.00
ADIS16266 SPI - 0.36 kHz 4.1 LSB/°/s - 4.75 to 5.25 41 mA $84.00
ADIS16136 SPI - 0.38 kHz - - 4.75 to 5.25 120 mA $649.00
ADIS16133 SPI +/- 1400 0.335 kHz 0.05 °/s/LSB 0.0122 4.85 to 5.15 88 mA $548.00
ADIS16135 SPI +/ - 300 °/s - 0.0122 °/s/LSB 0.0122 4.75 to 5.25 88 mA $499.00
ADIS16265 SPI +/- 80 to +/- 320 °/s - 0.0183 °/s/LSB 0.044 4.75 to 5.25 41 mA $56.57
ADIS16260 SPI +/- 80 to +/- 320 °/s 0.335 kHz 0.0183 °/s/LSB 0.044 4.75 to 5.25 41 mA $42.48
ADIS16060 SPI +/- 80 °/s 1 kHz 0.0122 °/s/LSB 0.04 4.75 to 5.25 6.5 mA $35.37
ADIS16080 SPI +/- 80 °/s 0.04 kHz 0.098 °/s/LSB 0.05 4.75 to 5.25 7 mA $35.37
back to top
沪ICP备09046653号
Send Feedback X
content here.
content here.

Send Feedback

Close