Microsystem Technology Laboratory (MTL) activities encompass integrated circuits, systems, electronic and photonic devices, MEMS, bio-MEMS, molecular devices, nanotechnology, sensors, and actuators. The range of materials continues to expand well beyond Si and Ge to include III-V compound semiconductors, nitride semiconductors, graphene and other 2D materials, polymers, glass, organics, and many others.
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MIT.nano is a new interdisciplinary facility for nanoscale research with shared facilities open to faculty, students, and researchers from any school, or department at MIT, as well other academic and industry users from outside of MIT.
Explore the MIT.nano Program