MEMS惯性传感器

惯性感测技术可以检测和测量加速度、倾斜、冲击、振动、旋转和多自由度(DoF)运动，帮助实现各种市场分化的工业、医疗、通信、消费和汽车应用。作为领先的MEMS技术创新者，ADI公司提供iMEMS®惯性感测器件，涵盖加速度计和陀螺仪，以及iSensor® 智能传感器，包括集成式惯性测量单元(IMU)。

产品选型表

了解有关惯性检测类型的更多信息：

加速度检测
什么是加速度检测？

加速度检测是测量物体沿一条直线或绕一条轴线从一点移动到另一点的运动。它包括位置和方向等平移运动。更多...

倾斜检测
什么是倾斜检测？

倾斜检测是测量相对于重力的倾斜度或角度变化。更多...

旋转检测
什么是旋转检测？

旋转检测是测量物体转动的角速率。旋转通常以相对于三条轴之一的每秒角度变化来度量：偏航、俯仰、滚动。更多...

冲击检测
什么是冲击检测？

冲击检测是测量预定位置处的突然撞击力。更多...

振动检测
什么是振动检测？

振动检测是测量以一定规律出现的加速度和减速度。更多...

多自由度(DoF)检测
什么是多自由度检测？

多自由度检测需组合实施多种类型检测，例如沿多条轴的加速度和旋转检测等。更多...

技术文档
基础知识
技术文章

MEMS Accelerometer

Part#	# of Axes	Range	Sensitivity	-3dB Bandwidth	Sensitivity Accuracy (%)	Output Type	Noise Density (µg/rtHz)	Voltage Supply (V)	Supply Current	Automotive Qualified	Temp Range (°C)	Package	US Price 1000-4999
ADXL001	1	+/- 70g	16 mV/g (+/- 70g)	22KHz	-	Analog	4000	3.135 to 6	5mA	-	-40 to 125°C	5mm x 5mm Ceramic LCC	$13.29
ADXL103	1	+/- 1.7g, +/- 18g, +/- 5g	1000 mV/g	2.5KHz	4	Analog	110	3 to 6	700µA	Yes	-40 to 125°C	5mm x 5mm x 2mm LCC	$8.2
ADXL180	1	50 g to 500 g	0.125 g/LSB (50 g), 1.25 g/LSB (500 g)	800Hz	-	Digital	-	5 to 14.5	7.7mA	-	-40 to 125°C	CP-16	**
ADXL193	1	+/- 250g	8 mV/g	400Hz	5	Analog	5000	4.75 to 5.25	1.5mA	Yes	-40 to 125°C	E-8	$6.68
ADXL203 Reference Circuit Available	2	+/- 1.7g, +/- 18g, +/- 5g	1000 mV/g	2.5KHz	4	Analog	110	3 to 6	700µA	-	-40 to 125°C	5mm x 5mm x 2mm LCC	$9.87
ADXL206	2	+/- 5g	312 mV/g	-	-	Analog	110	4.75 to 5.25	700µA	-	-40 to 175°C	8-Lead SBDIP	$569
ADXL212	2	+/- 2g	12.5 %/g	500Hz	12.5	Digital	-	3 to 5.25	700µA	-	-40 to 85°C	8-Lead LCC	$9.87
ADXL213	2	+/- 1.2g	30 %/g	2.5KHz	10	PWM	160	3 to 6	700µA	-	-40 to 85°C	5mm x 5mm x 2mm LCC	$10.33
ADXL278	2	+/- 70g	27mV/g	400Hz	5	Analog	1800	4.75 to 5.25	2.2mA	Yes	-40 to 105-	5mm x 5mm Ceramic LCC	$7.84
ADXL312	3	+/- 12 g	345 LSB/g	1.6KHz	-	Digital	340	2.0 to 3.6	170µA	Yes	-40 to 105°C	5mm x 5mm LFCSP	$5.34
ADXL325	3	+/- 5g	174 mV/g	1.6KHz	10	Analog	250	1.8 to 3.6	350µA	-	-40 to 85°C	4mm x 4mm LFCSP	$2.38
ADXL326	3	+/- 16g	57 mV/g	1.6KHz	10	Analog	250	1.8 to 3.6	350µA	-	-40 to 85°C	4mm x 4mm LFCSP	$2.38
ADXL327	3	+/- 2g	420 mV/g	1.6KHz	10	Analog	250	1.8 to 3.6	350µA	-	-40 to 85°C	4mm x 4mm LFCSP	$2.38
ADXL335	3	+/- 3g	300 mV/g	1.6KHz	10	Analog	300	1.8 to 3.6	350µA	-	-40 to 85°C	4mm x 4mm LFCSP	$2.38
ADXL337	3	+/- 3g	300 mV/g	1.6KHz	-	Analog	175	1.8 to 3.6	300µA	-	-40 to 85°C	3mm x 3mm LFCSP	$1.57
ADXL343	3	+/- 2/4/8/16g	256 LSB/g	320Hz	-	Digital	-	2.0 to 3.6	-	-	-	-	$1.15
ADXL344	3	+/- 2/4/8/16g	-	3.2KHz	-	SPI	-	1.7 to 2.75	140µA	-	-	-	$1.15
ADXL345 Reference Circuit Available	3	+/- 2/4/8/16g	up to 256 LSB/g	1.6KHz	10	Digital	-	2.0 to 3.6	145µA	-	-40 to 85°C	3mm x 5mm x 1mm LGA	$3.04
ADXL346	3	+/- 2/4/8/16g	up to 256 LSB/g	1.6KHz	10	Digital	-	1.7 to 2.75	145µA	-	-40 to 85°C	3mm x 3mm x 0.95 mm LGA	$3.04
ADXL350	3	+/- 2/4/8g	up to 256 LSB/g	3.2KHz	-	SPI	-	2.0 to 3.6	166µA	-	-40 to 85°C	-	$4.57
ADXL362 Reference Circuit Available	3	+/- 2/4/8g	1 to 4 mg/LSB	200Hz	-	Digital	175	1.6 to 3.5	1.8µA	-	-40 to 85°C	-	$3.97
ADXL377	3	+/- 200g	6.5 mV/g	1.6KHz	-	Analog	2400	3 to 3.6	300µA	-	-40 to 85°C	-	$4.79
ADXL78	1	+/- 70g	27mV/g	400Hz	5	Analog	1800	4.75 to 5.25	1.3mA	Yes	-40 to 105-	5mm x 5mm Ceramic LCC	$5.58

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iSensor MEMS Accelerometer Subsytems

Part#	Output Type	Sensing Axis	Range	-3dB Bandwidth	Voltage Supply (V)	Sensitivity	Sensitivity Accuracy (%)	Temp Sensor	Package
ADIS16003	SPI	X, Y	+/- 1.7g	2.25KHz	3 to 5.25	1.22 mg/LSB	7	Yes	7mm x 7mm LGA
ADIS16006	SPI	X, Y	+/- 5g	2.25KHz	3 to 5.25	3.91 mg/LSB	6	Yes	7mm x 7mm LGA
ADIS16201	SPI	X, Y	+/- 1.7g	2.25KHz	3 to 3.6	0.10 °/LSB	1	Yes	9 mm x 9mm LGA
ADIS16203	SPI	Z	+/- 180°	2.25KHz	3 to 3.6	0.025 °/LSB	-	Yes	9 mm x 9mm LGA
ADIS16204	SPI	X, Y	+/- 70g X & +/- 37g Y	40Hz	3 to 3.6	17.13 mg/LSB	-	Yes	9 mm x 9mm LGA
ADIS16209	SPI	X, Y	+/- 90° or +/- 180°	50Hz	3 to 3.6	0.025 °/LSB	0.4	Yes	9 mm x 9mm LGA
ADIS16210	SPI	X, Y, Z	+/- 1.7g	50Hz	3.15 to 3.6	-	0.21	Yes	-
ADIS16220	SPI	X	+/- 70g	1KHz	3.15 to 3.6	19.073 mg/LSB	-	-	9.2mm x 9.2mm LGA
ADIS16223	SPI	X, Y or Z	+/- 70g	14.25KHz	3.15 to 3.6	4.768 mg/LSB	5	-	-
ADIS16227	SPI	X, Y, Z	+/- 70g	9KHz	-	-	5	-	-
ADIS16228	SPI	X, Y, Z	-	5KHz	3.15 to 3.6	-	6	Yes	-
ADIS16240	SPI	X, Y, Z	+/- 18g	1.6KHz	2.4 to 3.6	51.4 mg/LSB	-	-	12 mm x 12 mm BGA

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iSensor MEMS Inertial Measurement Units

Part#	Gyro Range	Bias Tempco °/sec/°C	In-Run Bias (°/hr)	ARW (°/sqrt hr)	Linear-g (°/sec/g)	Accelerometer Range	In-Run Bias (mg)	Max Pos Supply (V)	Package Size (mm)	US Price 1000-4999
ADIS16300	+/ - 300 °/s	0.1	25	1.9	0.05	+/-3 g	0.054	5.25V	23x31x6.3	$74
ADIS16305	+/ - 300 °/s	0.006	25	1.9	0.05	+/-3 g	0.037	5.25V	23x31x6.3	$96
ADIS16334	+/ - 300 °/s	0.01	25	-	0.05	+/-5 g	0.1	5.25V	24.1x32.7x10.6	$336
ADIS16360	+/ - 300 °/s	0.025	25	2	0.05	+/-18 g	0.2	5.25V	23x23x23	$287
ADIS16362	+/ - 300 °/s	0.01	25	2	0.05	+/-1.7 g	0.041	5.25V	23x23x23	$336
ADIS16364	+/ - 300 °/s	0.01	25	2	0.05	+/-5 g	0.1	5.25V	23x23x23	$336
ADIS16365	+/ - 300 °/s	0.01	25	2	0.05	+/-18 g	0.2	5.25V	23x23x23	$375
ADIS16367	+/ - 300 °/s	0.01	47	2	0.05	+/-18 g	0.2	5.25V	23x23x23	$403
ADIS16375	+/ - 300 °/s	0.005	12	1	0.013	+/-18 g	0.1	3.6V	47x44x14	$649
ADIS16385	+/ - 300 °/s	0.004	6	0.75	0.03	+/-5 g	0.05	5.15V	44x35.6x38.9	$869
ADIS16400	+/ - 300 °/s	0.025	25	2	0.05	+/-18 g	0.2	5.25V	23x23x23	$320
ADIS16405	+/ - 300 °/s	0.01	25	2	0.05	+/-18 g	0.2	5.25V	23x23x23	$412
ADIS16407	+/ - 300 °/s	0.01	25	1.9	0.05	+/-18 g	0.2	5.25V	23x23x23	$444
ADIS16445	+/- 250 °/s	40	12	0.56	0.015	+/-5 g	0.075	3.45V	24.1x37.7x10.8	$395
ADIS16448	+/- 1000 °/s	0.005	14.5	-	0.015	+/-18 g	0.25	3.45V	24.1x37.7x10.8	$459
ADIS16480	+/- 450 °/s	0.0025	6.25	0.3	0.009	+/-18 g	0.1	3.6V	47x44x14	$1545
ADIS16485	+/- 450 °/s	0.0025	6.25	0.3	0.009	+/-5 g	0.032	3.6V	47x44x14	$1095
ADIS16488	+/- 450 °/s	0.0025	6.25	0.3	0.009	+/-18 g	0.1	3.6V	47x44x14	$1190

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MEMS Gyroscopes

Part#	Sensitivity	Temp Range (°C)	Noise Density (°/s/rtHz)	-3dB Bandwidth	Range	Output Type	Nonliniarity	Temp Sensor	Voltage Reference	Voltage Supply (V)	Supply Current	Package	US Price 1000-4999
ADXRS450 Reference Circuit Available	80 LSB/°/s	-40 to 105°C	0.015	80Hz	+/-300 °/s	SPI	0.04% of FS	Yes	No	3 to 5.25	6mA	14-LCC, 16-Lead SOIC	$33.4
ADXRS453 Reference Circuit Available	80 LSB/°/s	-40 to 105°C	0.015	775Hz	+/ - 300 °/s	SPI	0.05% of FS rms	Yes	No	3 to 5.25	6mA	14-LCC, 16-Lead SOIC	$48.24
ADXRS620	6 mv/°/s	-40 to 105°C	0.05	2.5KHz	+/-300 °/s	Analog	0.1% of FS	Yes	No	4.75 to 5.25	3.5mA	7 mm x 7mm x 3mm BGA	$27.24
ADXRS622	7 mV/°/s	-40 to 105°C	0.06	2.5KHz	+/- 250 °/s	Analog	0.1% of FS	Yes	No	4.75 to 5.25	3.5mA	7 mm x 7mm x 3mm BGA	$27.24
ADXRS623	12.5mV/°/s	-40 to 105°C	0.04	3KHz	+/- 150 °/s	Analog	0.1% of FS	Yes	No	4.75 to 5.25	3.5mA	7 mm x 7mm x 3mm BGA	$27.24
ADXRS624	25 mV/°/s	-40 to 105°C	0.04	1KHz	+/- 50 °/s	Analog	0.1% of FS	Yes	No	4.75 to 5.25	3.5mA	7 mm x 7mm x 3mm BGA	$27.24
ADXRS642	7 mV/°/s	-40 to 105°C	0.02	2KHz	+/- 250 °/s	Analog	0.1% of FS	Yes	No	4.75 to 5.25	3.5mA	7mm x 7mm x 3mm BGA	$41.85
ADXRS646	9 mV/°/s	-40 to 125°C	0.01	1Hz	+/- 250 °/s	Analog	0.01% of FS	Yes	-	5.75 to 6.25	4mA	7 mm x 7mm x 3mm BGA	$61.82
ADXRS649	0.1 mV/°/s	-40 to 105°C	0.25	2KHz	+/- 20000 °/s	Analog	0.1% of FS	Yes	No	4.75 to 5.25	3.5mA	7 mm x 7mm x 3mm BGA	$58.59
ADXRS652	7 mV/°/s	-40 to 105°C	0.06	2.5KHz	+/- 250 °/s	Analog	0.1% of FS	Yes	No	4.75 to 5.25	3.5mA	7 mm x 7mm x 3mm BGA	$21.69
ADXRS800	-	-40 to 105°C	-	-	+/-300 °/s	SPI	-	Yes	-	3 to 5	-	16-Lead SOIC	**

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iSensor MEMS Gyroscope Subsystems

Part#	Output Type	Range	-3dB Bandwidth	Sensitivity	Noise Density (°/s/rtHz)	Voltage Supply (V)	Supply Current	Package	US Price 1000-4999
ADIS16060	SPI	+/- 80 °/s	1KHz	0.0122 °/s/LSB	0.04	4.75 to 5.25	6.5mA	8mm x 8mm LGA	$35.37
ADIS16080	SPI	+/- 80 °/s	40Hz	0.098 °/s/LSB	0.05	4.75 to 5.25	7mA	8mm x 8mm LGA	$35.37
ADIS16130	SPI	+/- 250 °/s	300Hz	0.000042 °/s/LSB	0.0125	4.75 to 5.25	73mA	36 mm x 44 mm Mod	$504.99
ADIS16133	SPI	+/- 1400	335Hz	0.05 °/s/LSB	0.0122	4.85 to 5.15	88mA	36 mm x 44 mm Mod	$548
ADIS16135	SPI	+/ - 300 °/s	-	0.0122 °/s/LSB	0.0122	4.75 to 5.25	88mA	36 mm x 44 mm Mod	$499
ADIS16136	SPI	-	380Hz	-	-	4.75 to 5.25	120mA	-	$649
ADIS16260	SPI	+/- 80 to +/- 320 °/s	335Hz	0.0183 °/s/LSB	0.044	4.75 to 5.25	41mA	11.1 mm x 11.1mm LGA	$42.48
ADIS16265	SPI	+/- 80 to +/- 320 °/s	-	0.0183 °/s/LSB	0.044	4.75 to 5.25	41mA	11.1 mm x 11.1mm LGA	$56.57
ADIS16266	SPI	-	360Hz	4.1 LSB/°/s	-	4.75 to 5.25	41mA	-	$84