MEMS惯性传感器

惯性感测技术可以检测和测量加速度、倾斜、冲击、振动、旋转和多自由度(DoF)运动,帮助实现各种市场分化的工业、医疗、通信、消费和汽车应用。作为领先的MEMS技术创新者,ADI公司提供iMEMS®惯性感测器件,涵盖加速度计和陀螺仪,以及iSensor® 智能传感器,包括集成式惯性测量单元(IMU)。

Circuit from the lab 已完成设计、测试,可供立即集成

产品选型表

了解有关惯性检测类型的更多信息:

  • 加速度检测

  • 什么是加速度检测?

    加速度检测是测量物体沿一条直线或绕一条轴线从一点移动到另一点的运动。它包括位置和方向等平移运动。 更多...

  • 倾斜检测

  • 什么是倾斜检测?

    倾斜检测是测量相对于重力的倾斜度或角度变化。 更多...

  • 旋转检测

  • 什么是旋转检测?

    旋转检测是测量物体转动的角速率。旋转通常以相对于三条轴之一的每秒角度变化来度量:偏航、俯仰、滚动。 更多...

  • 冲击检测

  • 什么是冲击检测?

    冲击检测是测量预定位置处的突然撞击力。 更多...

  • 振动检测

  • 什么是振动检测?

    振动检测是测量以一定规律出现的加速度和减速度。 更多...

  • 多自由度(DoF)检测

  • 什么是多自由度检测?

    多自由度检测需组合实施多种类型检测,例如沿多条轴的加速度和旋转检测等。 更多...

MEMS Accelerometer

Part#Number of AxesAccelerometer Range in g +/- (max)-3dB Bandwidth (typ)Noise DensityOutput TypeSensitivity (typ)Sensitivity AccuracySupply CurrentVoltage SupplyAutomotive RecommendedUS Price 1000 to 4999Operating Temp Range
ADXL363 3 - - - Digital 1 to 4 mg/LSB - 1.95 µA - - $4.57 -40 to +85
ADXL375 3 +/- 200g 1.6 kHz 5000 Digital 20.5 LSBs/g - 145 µA - - $4.79 -40 to +85
ADXL313 3 +/- 0.5 g 1.6 kHz 150 Digital 1024 LSB/g 10 170 µA 2.0 to 3.6 Yes - -40 to +105
ADXL377 3 +/- 200g 1.6 kHz 2400 Analog 6.5 mV/g - 300 µA 3 to 3.6 - $4.79 -40 to +85
ADXL362Reference Circuit Available 3 +/- 2/4/8g 0.2 kHz 175 Digital 1 to 4 mg/LSB - 1.8 µA 1.6 to 3.5 - $3.97 -40 to +85
ADXL350 3 +/- 2/4/8g 1.6 kHz - SPI up to 256 LSB/g - 166 µA 2.0 to 3.6 - $4.57 -40 to +85
ADXL344 3 +/- 2/4/8/16g 1.6 kHz - SPI 256 LSB/g - 140 µA 1.7 to 2.75 - $1.15 -40 to +85
ADXL343 3 +/- 2/4/8/16g 0.32 kHz - Digital 256 LSB/g - - 2.0 to 3.6 - $1.15 -
ADXL212 2 +/- 2g 0.5 kHz - Digital 12.5 %/g 12.5 0.7 mA 3 to 5.25 - $12.23 -40 to +85
ADXL206 2 +/- 5g - 110 Analog 312 mV/g - 0.7 mA 4.75 to 5.25 - $569.00 -40 to 175°C
ADXL312 3 +/- 12 g 1.6 kHz 340 Digital 345 LSB/g - 170 µA 2.0 to 3.6 Yes $3.33 -40 to +105
ADXL337 3 +/- 3g 1.6 kHz 175 Analog 300 mV/g - 300 µA 1.8 to 3.6 - $1.57 -40 to +85
ADXL346 3 +/- 2/4/8/16g 1.6 kHz - Digital up to 256 LSB/g 10 145 µA 1.7 to 2.75 - $3.04 -40 to +85
ADXL327 3 +/- 2g 1.6 kHz 250 Analog 420 mV/g 10 350 µA 1.8 to 3.6 - $2.38 -40 to +85
ADXL326 3 +/- 16g 1.6 kHz 250 Analog 57 mV/g 10 350 µA 1.8 to 3.6 - $2.38 -40 to +85
ADXL325 3 +/- 5g 1.6 kHz 250 Analog 174 mV/g 10 350 µA 1.8 to 3.6 - $2.38 -40 to +85
ADXL345Reference Circuit Available 3 +/- 2/4/8/16g 1.6 kHz - Digital up to 256 LSB/g 10 145 µA 2.0 to 3.6 - $3.04 -40 to +85
ADXL001Reference Circuit Available 1 +/- 70g 22 kHz 4000 Analog 16 mV/g (+/- 70g) - 5 mA 3.135 to 6 - $13.29 -40 to +125
ADXL335 3 +/- 3g 1.6 kHz 300 Analog 300 mV/g 10 350 µA 1.8 to 3.6 - $2.38 -40 to +85
ADXL180 1 50 g to 500 g 0.8 kHz - Digital 0.125 g/LSB (50 g) - 7.7 mA 5 to 14.5 - - -40 to +125
ADXL213 2 +/- 1.2g 2.5 kHz 160 PWM 30 %/g 10 0.7 mA 3 to 6 - $12.23 -40 to +85
ADXL203Reference Circuit Available 2 +/- 1.7g 2.5 kHz 110 Analog 1000 mV/g 4 0.7 mA 3 to 6 - $12.23 -40 to +125
ADXL103 1 +/- 1.7g 2.5 kHz 110 Analog 1000 mV/g 4 0.7 mA 3 to 6 Yes $10.17 -40 to +125
ADXL78 1 +/- 70g 0.4 kHz 1800 Analog 27mV/g 5 1.3 mA 4.75 to 5.25 Yes $5.58 -40 to +105
ADXL278 2 +/- 70g 0.4 kHz 1800 Analog 27mV/g 5 2.2 mA 4.75 to 5.25 Yes $7.84 -40 to +105
ADXL193 1 +/- 250g 0.4 kHz 5000 Analog 8 mV/g 5 1.5 mA 4.75 to 5.25 Yes $6.68 -40 to +125
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iSensor MEMS Accelerometer Subsytems

Part#Device Primary FunctionOutput TypeSensing AxisRange-3dB BandwidthVoltage Supply (V)SensitivitySensitivity Accuracy (%)Temp Sensor
ADIS16229 Accelerometer for ADIS160 - - - 840 Hz 3 to 3.6 - 0.3 -
ADIS16000 Wireless gateway for ADIS - - - - - - - -
ADIS16228 Accelerometer W/FFT proce SPI X, Y, Z - 5 kHz 3.15 to 3.6 - 6 Yes
ADIS16210 Inclinometer SPI X, Y, Z +/- 1.7g 0.05 kHz 3.15 to 3.6 - 0.21 Yes
ADIS16227 Accelerometer W/FFT proce SPI X, Y, Z +/- 70g 9 kHz - - 5 -
ADIS16223 Accelerometer SPI X, Y or Z +/- 70g 14.25 kHz 3.15 to 3.6 4.768 mg/LSB 5 -
ADIS16240 Impact/Recorder SPI X, Y, Z +/- 18g 1.6 kHz 2.4 to 3.6 51.4 mg/LSB - -
ADIS16209 Inclinometer SPI X, Y +/- 90° or +/- 180° 0.05 kHz 3 to 3.6 0.025 °/LSB 0.4 Yes
ADIS16203 Inclinometer SPI Z +/- 180° 2.25 kHz 3 to 3.6 0.025 °/LSB - Yes
ADIS16201 Inclinometer SPI X, Y +/- 1.7g 2.25 kHz 3 to 3.6 0.10 °/LSB 1 Yes
ADIS16006 Accelerometer SPI X, Y +/- 5g 2.25 kHz 3 to 5.25 3.91 mg/LSB 6 Yes
ADIS16003 Accelerometer SPI X, Y +/- 1.7g 2.25 kHz 3 to 5.25 1.22 mg/LSB 7 Yes
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iSensor MEMS Inertial Measurement Units

Part#Gyro RangeBias TempcoIn-Run BiasARW-3dB BandwidthNoise Density (°/s/rtHz)Linear-gAccelerometer RangeBias TempcoNoise Density (µg/rtHz)Calibration Range (min)Calibration Range (max)MEMS Sensor TypeVsupply Positive (min)Vsupply Positive (max)Isupply (max)Operating Temp RangeMEMS Sensitivity (typ)
ADIS16488A +/- 450 °/s 0.0025 5.1 0.3 5.5 kHz 0.0066 0.009 +/-18 g 16 67 70 -40 IMU 3 3.6 254 -40 to +85 0.0031°/s/LSB(+/-75°/s)
ADIS16445 +/- 250 °/s 40 12 0.56 - - 0.015 +/-5 g 0.005 - - - IMU 3.15 3.45 - - -
ADIS16448 +/- 1000 °/s 0.005 14.5 0.66 0.33 kHz - 0.015 +/-18 g 40 - - - IMU 3.15 3.45 76 mA -40 to +85 -
ADIS16485 +/- 450 °/s 0.0025 6.25 0.3 0.33 kHz - 0.009 +/-5 g 0.035 - -40 70 IMU - 3.6 197 mA -40 to +85 -
ADIS16480 +/- 450 °/s 0.0025 6.25 0.3 0.33 kHz - 0.009 +/-18 g 0.035 - -40 85 IMU 3 3.6 254 mA - -
ADIS16407 +/ - 300 °/s 0.01 25 1.9 0.33 kHz - 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 70 mA -40 to +105 0.05 °/s/LSB (+/-300°/s)
ADIS16334 +/ - 300 °/s 0.01 25 - 0.33 kHz 0.044 0.05 +/-5 g 0.05 - -40 85 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16375 +/ - 300 °/s 0.005 12 1 0.33 kHz 0.02 0.013 +/-18 g 0.035 - -40 85 IMU 3 3.6 173 mA -40 to +85 0.01311 °/s/LSB
ADIS16305 +/ - 300 °/s 0.006 25 1.9 0.33 kHz 0.04 0.05 +/-3 g 0.3 - -40 85 IMU 4.75 5.25 42 mA -40 to +85 0.0125°/s/LSB (+/-75°/s)
ADIS16367 +/ - 300 °/s 0.01 47 2 0.33 kHz 0.044 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 49 mA -40 to +105 0.05 °/s/LSB (+/-300°/s)
ADIS16362 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.044 0.05 +/-1.7 g 0.05 - -20 70 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16405 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.05 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 45 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16365 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.05 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16364 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.05 0.05 +/-5 g 0.05 - -20 70 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16300 +/ - 300 °/s 0.1 25 1.9 0.33 kHz 0.038 0.05 +/-3 g 0.45 - - 25 IMU 4.75 5.25 42 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
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MEMS Gyroscopes

Part#Sensing AxisMeasurement RangeMEMS Sensitivity (typ)Noise Density (typ)-3dB Bandwidth (typ)Nonlinearity (typ)Temp SensorVoltage ReferenceVoltage SupplySupply Current (typ)US Price 1000 to 4999Operating Temp RangeAutomotive Recommended
ADXRS645 - +/- 20000 °/s - 0.25 2000 Hz 0.1% of FS Yes No 4.75 to 5.25 - $975.00 -40 to 175°C -
ADIS16488A X, Y, Z +/- 450 °/s 0.0031°/s/LSB(+/-75°/s) 0.0066 5.5 kHz 0.01% of FS Yes No - 254 $1190.00 -40 to +85 -
ADXL363 X, Y or Z - 1 to 4 mg/LSB - - - Yes - - 1.95 µA $4.57 -40 to +85 -
ADIS16485 X +/- 450 °/s - - 0.33 kHz 0.01% of FS Yes Yes 3 to 3.6 197 mA $1095.00 -40 to +85 -
ADXRS646 Z +/- 250 °/s 9 mV/°/s 0.01 1 0.01% of FS Yes - 5.75 to 6.25 4 mA $61.82 -40 to +125 -
ADIS16136 - - - - 0.38 kHz 0.05% of FS rms Yes - 4.75 to 5.25 120 mA $649.00 -40 to +85 -
ADIS16228 X, Y, Z - - - 5 kHz 0.2% of FS Yes - 3.15 to 3.6 40 mA $159.00 -40 to +125 -
ADXRS800 Z +/-300 °/s - - - - Yes - 3 to 5 - - -40 to +105 Yes
ADXRS642 Z +/- 250 °/s 7 mV/°/s 0.02 2 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $41.85 -40 to +105 -
ADIS16407 - +/ - 300 °/s 0.05 °/s/LSB (+/-300°/s) - 0.33 kHz 0.1% of FS Yes No 4.75 to 5.25 70 mA $444.00 -40 to +105 -
ADIS16210 X, Y, Z +/- 1.7g - - 0.05 kHz - Yes - 3.15 to 3.6 18 mA $97.00 -40 to +85 -
ADXRS649 - +/- 20000 °/s 0.1 mV/°/s 0.25 2 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $58.59 -40 to +105 -
ADXRS453Reference Circuit Available - +/ - 300 °/s 80 LSB/°/s 0.015 0.775 kHz 0.05% of FS rms Yes No 3 to 5.25 6 mA $48.24 -40 to +105 -
ADXRS450Reference Circuit Available - +/-300 °/s 80 LSB/°/s 0.015 0.08 kHz 0.04% of FS Yes No 3 to 5.25 6 mA $33.40 -40 to +105 -
ADXRS652 - +/- 250 °/s 7 mV/°/s 0.06 2.5 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $21.69 -40 to +105 -
ADXRS624 - +/- 50 °/s 25 mV/°/s 0.04 1 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24 -40 to +105 -
ADXRS623 - +/- 150 °/s 12.5mV/°/s 0.04 3 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24 -40 to +105 -
ADXRS622 Z +/- 250 °/s 7 mV/°/s 0.06 2.5 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24 -40 to +105 -
ADXRS620 - +/-300 °/s 6 mv/°/s 0.05 2.5 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA $27.24 -40 to +105 -
ADIS16300 - +/ - 300 °/s 0.0125°/s/LSB (+/-75°/s) 0.038 0.33 kHz - Yes - 4.75 to 5.25 42 mA $74.00 -40 to +105 -
ADIS16209 X, Y +/- 90° or +/- 180° 0.025 °/LSB - 0.05 kHz - Yes - 3 to 3.6 14 mA $34.81 -40 to +125 -
ADIS16060 - +/- 80 °/s 0.0122 °/s/LSB 0.04 1 kHz - Yes Yes 4.75 to 5.25 6.5 mA $35.37 -40 to +105 -
ADIS16203 Z +/- 180° 0.025 °/LSB - 2.25 kHz - Yes - 3 to 3.6 11 mA $24.04 -40 to +125 -
ADIS16080 - +/- 80 °/s 0.098 °/s/LSB 0.05 0.04 kHz 0.12 °/sec Yes Yes 4.75 to 5.25 7 mA $35.37 -40 to +85 -
ADIS16201 X, Y +/- 1.7g 0.10 °/LSB - 2.25 kHz - Yes - 3 to 3.6 11 mA $24.04 -40 to +125 -
ADIS16006 X, Y +/- 5g 3.91 mg/LSB - 2.25 kHz - Yes - 3 to 5.25 1.4 mA $22.27 -40 to +125 -
ADIS16003 X, Y +/- 1.7g 1.22 mg/LSB - 2.25 kHz - Yes - 3 to 5.25 1.4 mA $17.96 -40 to +125 -
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iSensor MEMS Gyroscope Subsystems

Part#Output TypeRange-3dB BandwidthSensitivityNoise Density (°/s/rtHz)Voltage Supply (V)Supply CurrentUS Price 1000 to 4999
ADIS16137 Digital +/- 1000 °/s 400 Hz - 0.00357 4.75 to 5.25 120 mA $689.00
ADIS16266 SPI - 0.36 kHz 4.1 LSB/°/s - 4.75 to 5.25 41 mA $84.00
ADIS16136 SPI - 0.38 kHz - - 4.75 to 5.25 120 mA $649.00
ADIS16133 SPI +/- 1400 0.335 kHz 0.05 °/s/LSB 0.0122 4.85 to 5.15 88 mA $548.00
ADIS16135 SPI +/ - 300 °/s - 0.0122 °/s/LSB 0.0122 4.75 to 5.25 88 mA $499.00
ADIS16265 SPI +/- 80 to +/- 320 °/s - 0.0183 °/s/LSB 0.044 4.75 to 5.25 41 mA $56.57
ADIS16260 SPI +/- 80 to +/- 320 °/s 0.335 kHz 0.0183 °/s/LSB 0.044 4.75 to 5.25 41 mA $42.48
ADIS16060 SPI +/- 80 °/s 1 kHz 0.0122 °/s/LSB 0.04 4.75 to 5.25 6.5 mA $35.37
ADIS16080 SPI +/- 80 °/s 0.04 kHz 0.098 °/s/LSB 0.05 4.75 to 5.25 7 mA $35.37
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