Инерциальные датчики МЭМС

Откройте для себя технологии инерциальных датчиков МЭМС, которые позволяют обнаруживать и измерять ускорение, отклонение, ударные нагрузки, вибрации и скорость вращения, а также осуществлять измерения с несколькими степенями свободы. Определите, какой из типов датчиков МЭМС наиболее подходит для измерения параметров движения в вашей задаче. Загрузите ответы на часто задаваемые вопросы по инерциальным датчикам, обзорные статьи и свежую техническую статью Gyro Mechanical Performance: The Most Important Parameter, MS-2158. Прочитайте истории из успешной практики применения инерциальных датчиков. Ознакомьтесь с бюллетенями технических решений, в которых описываются ключевые особенности технологий инерциальных датчиков МЭМС.

Компания Analog Devices предлагает дискретные и интегрированные инерциальные датчики (акселерометры и гироскопы) iMEMS®, а также интеллектуальные датчики и инерциальные измерительные модули (IMU, inertial measurement units) iSensor® с высокой степенью интеграции, которые полностью протестированы и откалиброваны при производстве.

ТАБЛИЦЫ ВЫБОРА ПРОДУКТОВ

Learn More About the Types of Inertial Sensing:

  • Sense Acceleration

  • What is Acceleration Sensing?

    Acceleration sensing refers to the movement of an object from one point to another along a straight line or axis. It includes translational movement such as position and orientation. More...

  • Sense Tilt

  • What is Tilt Sensing?

    Tilt sensing measures the inclination or angle of change with respect to gravity. More...

  • Sense Rotation

  • What is Rotation Sensing?

    Rotation sensing measures the angular rate–how quickly an object turns. The rotation is typically measured in degrees per second of change and in reference to one of three axes: yaw, pitch, or roll. More...

  • Sense Shock

  • What is Shock Sensing?

    Shock sensing detects sudden impact at a predetermined level. More...

  • Sense Vibration

  • What is Vibration Sensing?

    Vibration sensing detects acceleration and deceleration occurring in a periodic manner. More...

  • Sense Multiple Degrees-of-Freedom (DoF)

  • What is Multiple Degrees-of-Freedom Sensing?

    Multiple DoF sensing relies on the combined input of multiple sensing types, such as acceleration and rotation, along multiple axis. More...

MEMS Accelerometer

Part# # of AxesRangeSensitivity-3dB BandwidthSensitivity Accuracy (%)Output TypeNoise Density (µg/rtHz)Voltage Supply (V)Supply CurrentAutomotive QualifiedTemp Range (°C)PackageUS Price 1000-4999
ADXL0011+/- 70g16 mV/g (+/- 70g)22KHz-Analog40003.135 to 65mA--40 to 125°C5mm x 5mm Ceramic LCC $13.29
ADXL1031+/- 1.7g, +/- 18g, +/- 5g1000 mV/g2.5KHz4Analog1103 to 6700µAYes-40 to 125°C5mm x 5mm x 2mm LCC $8.2
ADXL180150 g to 500 g0.125 g/LSB (50 g), 1.25 g/LSB (500 g)800Hz-Digital-5 to 14.5 7.7mA--40 to 125°CCP-16 **
ADXL1931+/- 250g8 mV/g400Hz5Analog50004.75 to 5.251.5mAYes-40 to 125°CE-8 $6.68
ADXL203Reference Circuit Available2+/- 1.7g, +/- 18g, +/- 5g1000 mV/g2.5KHz4Analog1103 to 6700µA--40 to 125°C5mm x 5mm x 2mm LCC $9.87
ADXL2062+/- 5g312 mV/g--Analog1104.75 to 5.25700µA--40 to 175°C8-Lead SBDIP $569
ADXL2122+/- 2g12.5 %/g500Hz12.5Digital-3 to 5.25700µA--40 to 85°C8-Lead LCC $9.87
ADXL2132+/- 1.2g30 %/g2.5KHz10PWM1603 to 6700µA--40 to 85°C5mm x 5mm x 2mm LCC $10.33
ADXL2782+/- 70g27mV/g400Hz5Analog18004.75 to 5.252.2mAYes-40 to 105-5mm x 5mm Ceramic LCC $7.84
ADXL3123+/- 12 g345 LSB/g1.6KHz-Digital3402.0 to 3.6170µAYes-40 to 105°C 5mm x 5mm LFCSP $5.34
ADXL3253+/- 5g174 mV/g1.6KHz10Analog2501.8 to 3.6350µA--40 to 85°C4mm x 4mm LFCSP $2.38
ADXL3263+/- 16g57 mV/g1.6KHz10Analog2501.8 to 3.6350µA--40 to 85°C4mm x 4mm LFCSP $2.38
ADXL3273+/- 2g420 mV/g1.6KHz10Analog2501.8 to 3.6350µA--40 to 85°C4mm x 4mm LFCSP $2.38
ADXL3353+/- 3g300 mV/g1.6KHz10Analog3001.8 to 3.6350µA--40 to 85°C4mm x 4mm LFCSP $2.38
ADXL3373+/- 3g300 mV/g1.6KHz-Analog1751.8 to 3.6300µA--40 to 85°C3mm x 3mm LFCSP $1.57
ADXL3433+/- 2/4/8/16g256 LSB/g320Hz-Digital-2.0 to 3.6---- $1.15
ADXL3443+/- 2/4/8/16g-3.2KHz-SPI-1.7 to 2.75140µA--- $1.15
ADXL345Reference Circuit Available3+/- 2/4/8/16gup to 256 LSB/g1.6KHz10Digital-2.0 to 3.6145µA--40 to 85°C3mm x 5mm x 1mm LGA $3.04
ADXL3463+/- 2/4/8/16gup to 256 LSB/g1.6KHz10Digital-1.7 to 2.75145µA--40 to 85°C3mm x 3mm x 0.95 mm LGA $3.04
ADXL3503+/- 2/4/8gup to 256 LSB/g3.2KHz-SPI-2.0 to 3.6166µA--40 to 85°C- $4.57
ADXL362Reference Circuit Available3+/- 2/4/8g1 to 4 mg/LSB200Hz-Digital1751.6 to 3.51.8µA--40 to 85°C- $3.97
ADXL3773+/- 200g6.5 mV/g1.6KHz-Analog24003 to 3.6300µA--40 to 85°C- $4.79
ADXL781+/- 70g27mV/g400Hz5Analog18004.75 to 5.251.3mAYes-40 to 105-5mm x 5mm Ceramic LCC $5.58
Назад к началу

iSensor MEMS Accelerometer Subsytems

Part# Output TypeSensing AxisRange-3dB BandwidthVoltage Supply (V)SensitivitySensitivity Accuracy (%)Temp SensorPackage
ADIS16003SPIX, Y+/- 1.7g2.25KHz3 to 5.251.22 mg/LSB7Yes7mm x 7mm LGA
ADIS16006SPIX, Y+/- 5g2.25KHz3 to 5.253.91 mg/LSB6Yes7mm x 7mm LGA
ADIS16201SPIX, Y+/- 1.7g2.25KHz3 to 3.60.10 °/LSB1Yes9 mm x 9mm LGA
ADIS16203SPIZ+/- 180°2.25KHz3 to 3.60.025 °/LSB-Yes9 mm x 9mm LGA
ADIS16204SPIX, Y+/- 70g X & +/- 37g Y 40Hz3 to 3.617.13 mg/LSB-Yes9 mm x 9mm LGA
ADIS16209SPIX, Y+/- 90° or +/- 180°50Hz3 to 3.60.025 °/LSB0.4Yes9 mm x 9mm LGA
ADIS16210SPIX, Y, Z+/- 1.7g50Hz3.15 to 3.6-0.21Yes-
ADIS16220SPIX+/- 70g1KHz3.15 to 3.619.073 mg/LSB--9.2mm x 9.2mm LGA
ADIS16223SPIX, Y or Z+/- 70g14.25KHz3.15 to 3.64.768 mg/LSB5--
ADIS16227SPIX, Y, Z+/- 70g9KHz--5--
ADIS16228SPIX, Y, Z-5KHz3.15 to 3.6-6Yes-
ADIS16240SPIX, Y, Z+/- 18g1.6KHz2.4 to 3.651.4 mg/LSB--12 mm x 12 mm BGA
Назад к началу

iSensor MEMS Inertial Measurement Units

Part# Gyro RangeBias Tempco °/sec/°CIn-Run Bias (°/hr)ARW (°/sqrt hr)Linear-g (°/sec/g)Accelerometer RangeIn-Run Bias (mg)Max Pos Supply (V)Package Size (mm)US Price 1000-4999
ADIS16300+/ - 300 °/s0.1251.90.05+/-3 g0.0545.25V23x31x6.3 $74
ADIS16305+/ - 300 °/s0.006251.90.05+/-3 g0.0375.25V23x31x6.3 $96
ADIS16334+/ - 300 °/s0.0125-0.05+/-5 g0.15.25V24.1x32.7x10.6 $336
ADIS16360+/ - 300 °/s0.0252520.05+/-18 g0.25.25V23x23x23 $287
ADIS16362+/ - 300 °/s0.012520.05+/-1.7 g0.0415.25V23x23x23 $336
ADIS16364+/ - 300 °/s0.012520.05+/-5 g0.15.25V23x23x23 $336
ADIS16365+/ - 300 °/s0.012520.05+/-18 g0.25.25V23x23x23 $375
ADIS16367+/ - 300 °/s0.014720.05+/-18 g0.25.25V23x23x23 $403
ADIS16375+/ - 300 °/s0.0051210.013+/-18 g0.13.6V47x44x14 $649
ADIS16385+/ - 300 °/s0.00460.750.03+/-5 g0.055.15V44x35.6x38.9 $869
ADIS16400+/ - 300 °/s0.0252520.05+/-18 g0.25.25V23x23x23 $320
ADIS16405+/ - 300 °/s0.012520.05+/-18 g0.25.25V23x23x23 $412
ADIS16407+/ - 300 °/s0.01251.90.05+/-18 g0.25.25V23x23x23 $444
ADIS16445+/- 250 °/s40120.560.015+/-5 g0.0753.45V24.1x37.7x10.8 $395
ADIS16448+/- 1000 °/s 0.00514.5-0.015+/-18 g0.253.45V24.1x37.7x10.8 $459
ADIS16480+/- 450 °/s 0.00256.250.30.009+/-18 g0.13.6V47x44x14 $1545
ADIS16485+/- 450 °/s 0.00256.250.30.009+/-5 g0.0323.6V47x44x14 $1095
ADIS16488+/- 450 °/s 0.00256.250.30.009+/-18 g0.13.6V47x44x14 $1190
Назад к началу

MEMS Gyroscopes

Part# SensitivityTemp Range (°C)Noise Density (°/s/rtHz)-3dB BandwidthRangeOutput TypeNonliniarityTemp SensorVoltage ReferenceVoltage Supply (V)Supply CurrentPackageUS Price 1000-4999
ADXRS450Reference Circuit Available80 LSB/°/s -40 to 105°C 0.01580Hz+/-300 °/sSPI0.04% of FS YesNo3 to 5.256mA14-LCC, 16-Lead SOIC $33.4
ADXRS453Reference Circuit Available80 LSB/°/s -40 to 105°C 0.015775Hz+/ - 300 °/sSPI0.05% of FS rmsYesNo3 to 5.256mA14-LCC, 16-Lead SOIC $48.24
ADXRS6206 mv/°/s -40 to 105°C 0.052.5KHz+/-300 °/sAnalog0.1% of FSYesNo4.75 to 5.253.5mA7 mm x 7mm x 3mm BGA $27.24
ADXRS6227 mV/°/s-40 to 105°C 0.062.5KHz+/- 250 °/sAnalog0.1% of FSYesNo4.75 to 5.253.5mA7 mm x 7mm x 3mm BGA $27.24
ADXRS62312.5mV/°/s-40 to 105°C 0.043KHz+/- 150 °/sAnalog0.1% of FSYesNo4.75 to 5.253.5mA7 mm x 7mm x 3mm BGA $27.24
ADXRS62425 mV/°/s -40 to 105°C 0.041KHz+/- 50 °/s Analog0.1% of FSYesNo4.75 to 5.253.5mA7 mm x 7mm x 3mm BGA $27.24
ADXRS6427 mV/°/s-40 to 105°C 0.022KHz+/- 250 °/sAnalog0.1% of FSYesNo4.75 to 5.253.5mA7mm x 7mm x 3mm BGA $41.85
ADXRS6469 mV/°/s-40 to 125°C0.011Hz+/- 250 °/sAnalog0.01% of FSYes-5.75 to 6.254mA7 mm x 7mm x 3mm BGA $61.82
ADXRS6490.1 mV/°/s -40 to 105°C 0.252KHz+/- 20000 °/s Analog0.1% of FSYesNo4.75 to 5.253.5mA7 mm x 7mm x 3mm BGA $58.59
ADXRS6527 mV/°/s-40 to 105°C 0.062.5KHz+/- 250 °/sAnalog0.1% of FSYesNo4.75 to 5.253.5mA7 mm x 7mm x 3mm BGA $21.69
ADXRS800--40 to 105°C --+/-300 °/sSPI-Yes-3 to 5-16-Lead SOIC **
Назад к началу

iSensor MEMS Gyroscope Subsystems

Part# Output TypeRange-3dB BandwidthSensitivityNoise Density (°/s/rtHz)Voltage Supply (V)Supply CurrentPackageUS Price 1000-4999
ADIS16060SPI+/- 80 °/s1KHz0.0122 °/s/LSB0.044.75 to 5.256.5mA8mm x 8mm LGA $35.37
ADIS16080SPI+/- 80 °/s40Hz0.098 °/s/LSB0.054.75 to 5.257mA8mm x 8mm LGA $35.37
ADIS16130SPI+/- 250 °/s300Hz0.000042 °/s/LSB 0.01254.75 to 5.2573mA36 mm x 44 mm Mod $504.99
ADIS16133SPI+/- 1400335Hz0.05 °/s/LSB 0.01224.85 to 5.1588mA36 mm x 44 mm Mod $548
ADIS16135SPI+/ - 300 °/s-0.0122 °/s/LSB0.01224.75 to 5.2588mA36 mm x 44 mm Mod $499
ADIS16136SPI-380Hz--4.75 to 5.25120mA- $649
ADIS16260SPI+/- 80 to +/- 320 °/s335Hz 0.0183 °/s/LSB 0.0444.75 to 5.2541mA11.1 mm x 11.1mm LGA $42.48
ADIS16265SPI+/- 80 to +/- 320 °/s- 0.0183 °/s/LSB 0.0444.75 to 5.2541mA11.1 mm x 11.1mm LGA $56.57
ADIS16266SPI-360Hz4.1 LSB/°/s-4.75 to 5.2541mA- $84
Назад к началу
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