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Piezo-film (Vibration, shock)
Inexpensive
AC Response only
Sense many things besides motion (sound, temperature, pressure)
Electromechanical Servo (Tilt, Inertial)
DC accurate, low frequency only
Tend to be fragile
Expensive
Piezoelectric (Vibration, Shock)
Wide-dynamic range
AC Response only
Can be expensive, depending on the package
Liquid tilt sensors (Tilt)
DC response
Inexpensive
Fragile
"Slosh" problems
Bulk Micromachined Piezo Resistive (Tilt, Vibration, Inertial)
DC Response
Difficult to trim, poor temperature performance
Can be expensive
Bulk Micromachined Capacitive (Tilt, Vibration, Inertial)
DC Response
Good DC accuracy, low noise
Expensive
Surface Micromachined Capacitive (Tilt, Vibration, Inertial)
DC Response
Standard IC form factors
Inexpensive |