0.1µgrams Proof Mass

0.1pF per Side for the Differential Capacitor

20aF (10-18f) Smallest Detectable Capacitance Change

Total Capacitance Change for Full-scale is 10fF

1.3µm Gaps Between Capacitor Plates

0.2Å Minimum Detectable Beam Deflection (one tenth of an Atomic diameter)

1.6µm Between the Suspended Beam and Substrate

10 to 22kHz Resonant Frequency of Beam