Surface Micromachined Mechanical Element

Combination of springs, masses, motion sensing and actuation cells

BiMOS Circuitry for On-Board Signal Conditioning

Oscillators and Demodulators

Amplifiers and Filters

Self Test Circuitry

All On a Single I.C. Chip

Fabricated in a Standard I.C. Wafer Fab

Uses Standard I.C. Photo Lithographic, Etch, and Implant Technologies

Packaged Using Specially Developed Techniques to Protect Moving Parts

Highly Reliable, Low Cost Solution to Motion Sensors